Advanced Spin Coating Film Transfer and Hot-Pressing Process for Global Planarization with Dielectric-Material-Viscosity Control

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2002-04, Vol.41 (Part 1, No. 4B), p.2367-2373
Main Authors: Sato, Norio, Machida, Katsuyuki, Yano, Masaki, Kudou, Kazuhisa, Kyuragi, Hakaru
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.41.2367