Thermodynamic Analysis of In x Ga 1-x N Alloy Composition Grown by Metalorganic Vapor Phase Epitaxy

A thermodynamic analysis of alloy composition is described for metalorganic vapor phase epitaxy (MOVPE) of In x Ga 1- x N. The vapor-solid distribution relationship is discussed in comparison with the experimental data reported in the literature. It is shown that the solid composition of In x Ga 1-...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1996-06, Vol.35 (6A), p.L673
Main Authors: Koukitu, Akinori, Takahashi, Naoyuki, Tetsuya Taki, Tetsuya Taki, Hisashi Seki, Hisashi Seki
Format: Article
Language:English
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Summary:A thermodynamic analysis of alloy composition is described for metalorganic vapor phase epitaxy (MOVPE) of In x Ga 1- x N. The vapor-solid distribution relationship is discussed in comparison with the experimental data reported in the literature. It is shown that the solid composition of In x Ga 1- x N alloy grown by MOVPE is thermodynamically controlled. The origin of the deviation of the solid composition from the linear relation is also discussed.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.35.L673