Ion-assisted deposition of aluminum nitride on the fluorozirconate glass surface

Aluminum nitride films were grown on the surface of the fluorozirconate glass by an ion-assisted deposition (IAD) method. The films did not affect the infrared transmission of the glass. The Al-N bonding in the films was confirmed by the IR absorption band centered around 650 cm -1 . The absorption...

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Bibliographic Details

Published in:	Japanese Journal of Applied Physics 1991-07, Vol.30 (7B), p.L1314-L1316
Main Authors:	DAI, Y, KAWAGUCHI, T, OSUKA, T, TADA, M, SUZUKI, K, SUZUKI, S, MASUI, A
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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