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Origin of Larger Drain Current Variability in N-Type Field-Effect Transistors Analyzed by Variability Decomposition Method
The origin of larger on-state drain current ($I_{\text{ON}}$) variability in n-type field-effect transistors (NFETs) than that in p-type field-effect transistors (PFETs), is investigated by evaluating FETs fabricated using 65 nm technology. It is found that the larger $I_{\text{ON}}$ variability in...
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Published in: | Applied physics express 2010-11, Vol.3 (11), p.114201-114201-3 |
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Main Authors: | , , , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | The origin of larger on-state drain current ($I_{\text{ON}}$) variability in n-type field-effect transistors (NFETs) than that in p-type field-effect transistors (PFETs), is investigated by evaluating FETs fabricated using 65 nm technology. It is found that the larger $I_{\text{ON}}$ variability in NFETs is caused by not only the larger threshold voltage component but also the larger current-onset voltage component of the $I_{\text{ON}}$ variability in NFETs. Moreover, it is experimentally confirmed that $I_{\text{ON}}$ variability of NFETs can be reduced by the halo carbon co-implantation through the reduction of threshold voltage and current-onset voltage components of the $I_{\text{ON}}$ variability in NFETs. |
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ISSN: | 1882-0778 1882-0786 |
DOI: | 10.1143/APEX.3.114201 |