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Growth, chemical composition, and structure of thin La x Hf1 − x O y films on Si

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Bibliographic Details
Published in:	Inorganic materials 2014-02, Vol.50 (2), p.158-164
Main Authors:	Smirnova, T. P., Yakovkina, L. V., Borisov, V. O., Kichai, V. N., Kaichev, V. V., Saraev, A. A.
Format:	Article
Language:	English
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Online Access:	Get full text
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