Imaging and gasdynamic modeling of pulsed laser film deposition plumes

Optical multichannel emission spectroscopy and intensified charge-coupled device (ICCD) imaging have been applied to real-time, gas-phase species identification during the pulsed excimer or Nd:YAG laser deposition of various ceramic thin films. A plume gasdynamic expansion model has been developed a...

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Bibliographic Details
Published in:Optical Engineering 1996-11, Vol.35 (11), p.3199-3205
Main Authors: Schenck, Peter K, Hastie, John W, Paul, Albert J, Bonnell, David W
Format: Article
Language:English
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Summary:Optical multichannel emission spectroscopy and intensified charge-coupled device (ICCD) imaging have been applied to real-time, gas-phase species identification during the pulsed excimer or Nd:YAG laser deposition of various ceramic thin films. A plume gasdynamic expansion model has been developed and used to predict the outer-edge plume front locations for comparison with those observed in the ICCD images. Good agreement was found between the model and ICCD images, with plume temperatures indicated by the model to be typically between 10,000 and 50,000 K. The systems studied include PbZr Ti O (PZT), BaTiO , AlN, and BN. When high laser fluences were used, ICCD imaging also revealed strong evidence for interactions between the laser and the near-surface plume. Plume particulates were also noted at long times following the laser pulse. ©
ISSN:0091-3286
1560-2303
DOI:10.1117/1.601042