The Use of an Energy Dispersive X-Ray Analyzer in Scanning Electron Microscopy

The application of a high resolution semiconductor energy dispersive x-ray analyzer in scanning electron microscopy is described. Optimum specifications of an x-ray spectrometer for such application are outlined and various problems related to detection of low energy x-rays are discussed. Characteri...

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Bibliographic Details
Published in:IEEE transactions on nuclear science 1970-01, Vol.17 (1), p.354-362
Main Authors: Elad, E., Sandborg, A. O., Russ, J. C., Van Gorp, T.
Format: Article
Language:English
Subjects:
Biomedical optical imaging
Dispersion
Electron beams
Electron optics
Energy resolution
Optical microscopy
Probes
Scanning electron microscopy
Spectroscopy
Transmission electron microscopy
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Description
Summary:The application of a high resolution semiconductor energy dispersive x-ray analyzer in scanning electron microscopy is described. Optimum specifications of an x-ray spectrometer for such application are outlined and various problems related to detection of low energy x-rays are discussed. Characteristic x-rays of elements down to oxygen were detected with the described system, making it useful for a variety of industrial and research applications.
ISSN:0018-9499
1558-1578
DOI:10.1109/TNS.1970.4325597