Run-to-run failure detection and diagnosis using neural networks and Dempster-Shafer theory: an application to excimer laser ablation

The formation of microvias in multilayer substrates is a critical factor in microelectronic packaging manufacturing. Such microstructures can be produced efficiently by excimer laser ablation. Thus, laser ablation systems are evolving to a level where the need to offset high capital equipment invest...

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Bibliographic Details
Published in:IEEE transactions on electronics packaging manufacturing 2006-01, Vol.29 (1), p.42-49
Main Authors: Setia, R., May, G.S.
Format: Article
Language:English
Subjects:
Ablation
Applied sciences
Dempster-Shafer (D-S) theory
Design. Technologies. Operation analysis. Testing
Deviation
Diagnosis
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
excimer laser ablation
Excimer lasers
Failure
Failure detection
failure diagnosis
Integrated circuits
Investments
Laser ablation
Laser applications
Laser theory
Manufacturing
Methodology
Microelectronic fabrication (materials and surfaces technology)
microelectronic packaging
Microelectronics
Microstructure
microvias
Multi-layer neural network
Neural networks
Packaging machines
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Testing, measurement, noise and reliability
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Summary:The formation of microvias in multilayer substrates is a critical factor in microelectronic packaging manufacturing. Such microstructures can be produced efficiently by excimer laser ablation. Thus, laser ablation systems are evolving to a level where the need to offset high capital equipment investment and lower equipment downtime are imminent. This paper presents a methodology for inline failure detection and diagnosis of the excimer laser ablation process. The methodology employs response data originating directly from the equipment and characterization of microvias formed by the ablation process. Neural network (NN) models are trained and validated based on this data to generate evidential belief for potential sources of deviations in the responses. Dempster-Shafer (D-S) theory is adopted for evidential reasoning. Successful failure detection is achieved in 100% of 19 possible failure scenarios. Moreover, successful failure diagnosis is also achieved with only a single false alarm occurring in the 19 failure scenarios.
ISSN:1521-334X
1558-0822
DOI:10.1109/TEPM.2005.862631