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Intrinsic Photoconductive Switches Based on Semi-Insulator 4H-SiC
A high-purity semi-insulator 4H-SiC intrinsic photoconductive switch is presented. The photoconductive semiconductor switch device is fabricated as lateral structures with the electric contact on the same side. The effect of the SiO 2 passivation layer has been investigated on the breakdown voltage....
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Published in: | IEEE transactions on electron devices 2016-04, Vol.63 (4), p.1582-1586 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A high-purity semi-insulator 4H-SiC intrinsic photoconductive switch is presented. The photoconductive semiconductor switch device is fabricated as lateral structures with the electric contact on the same side. The effect of the SiO 2 passivation layer has been investigated on the breakdown voltage. The minimum ON-state resistance is 16 Ω, and the breakdown voltage is 11 kV. A new phenomenon that two steps exist on the rising edge of the photocurrent is observed, and a model of resistor and capacitor in parallel is built to explain it. |
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ISSN: | 0018-9383 1557-9646 |
DOI: | 10.1109/TED.2016.2526642 |