A Correlation Between Oxygen Vacancies and Reliability Characteristics in a Single Zirconium Oxide Metal-Insulator-Metal Capacitor

A correlation between reliability characteristics and failure mechanisms for time-dependent dielectric breakdown for a single ZrO 2 metal-insulator-metal capacitor has been studied. Frenkel-Poole emission was the dominant mechanism in the high electric field region. The extracted dynamic constant an...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2014-08, Vol.61 (8), p.2619-2627
Main Authors: Hyuk-Min Kwon, Sung-Kyu Kwon, Kwang-Seok Jeong, Sung-Kwen Oh, Sun-Ho Oh, Woon-Il Choi, Tae-Woo Kim, Dae-Hyun Kim, Chang-Yong Kang, Byoung Hun Lee, Kirsch, Paul, Hi-Deok Lee
Format: Article
Language:English
Subjects:
Capacitors
Charge trapping
Constants
Dielectrics
Dynamics
Electric breakdown
Electric potential
Frenkel-Poole (F-P) emission
high-κ (HK) dielectric
Leakage currents
Mathematical models
metal-insulator-metal (MIM) capacitor
MIM capacitors
Reliability
Stress
Stresses
time-dependent dielectric breakdown (TDDB)
Voltage
Weibull distribution
Zirconium
Zirconium dioxide
ZrO
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Summary:A correlation between reliability characteristics and failure mechanisms for time-dependent dielectric breakdown for a single ZrO 2 metal-insulator-metal capacitor has been studied. Frenkel-Poole emission was the dominant mechanism in the high electric field region. The extracted dynamic constant and trap energy level were 4.013 and 0.963 eV, respectively. The variation of α as a function of stress time under constant voltage stress (CVS) gradually decreased. Moreover, ΔC stress /C 0 under dynamic voltage stress was much greater than under CVS, which indicates that new defects and charge trapping could be generated in high-κ (HK) dielectric under dynamic voltage stress under negative voltage as well as positive voltage. The extracted average value of the Weibull slope (β) at 125°C was in the range 1.3-1.6. The average field acceleration parameter was ~8.67 cm/MV, and an effective dipole moment of bond breakage peff was ~29.73e Å. The thermochemical model (E model) suggested that the oxygen vacancies induced by the dipolar energy contribution (p · Eloc) easily caused bond breakage in the HK dielectric. The energy required to form another V 0 was weakened to the bond strength of polar molecules. The characteristic breakdown strength (EBD) of ZrO 2 was 6.31 MV/cm, and the extracted activation energy AH 0 * was 1.874 eV when considering E model.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2014.2326423