Enhancing the Static and Dynamic Performance of High-Speed VCSELs by Zn-Diffused Shallow Surface Relief Apertures

In this paper, we demonstrate a novel structure for 850- and 940-nm wavelength high-speed vertical-cavity surface-emitting lasers (VCSELs). Extra shallow apertures (~20 nm) are etched on the topmost current spreading (CS) layer of 850- or 940-nm VCSELs, which have Zn-diffusion and oxide-relief apert...

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Bibliographic Details
Published in:IEEE journal of quantum electronics 2018-10, Vol.54 (5), p.1-6
Main Authors: Khan, Zuhaib, Yen, Jia-Liang, Cheng, Chen-Lung, Chi, Kai-Lun, Shi, Jin-Wei
Format: Article
Language:English
Subjects:
Apertures
Data transmission
Diffusion layers
Diffusion rate
Etching
High speed
Optical surface waves
Performance enhancement
Power generation
Semiconductor lasers
Surface waves
Vertical cavity surface emission lasers
Vertical cavity surface emitting lasers
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Summary:In this paper, we demonstrate a novel structure for 850- and 940-nm wavelength high-speed vertical-cavity surface-emitting lasers (VCSELs). Extra shallow apertures (~20 nm) are etched on the topmost current spreading (CS) layer of 850- or 940-nm VCSELs, which have Zn-diffusion and oxide-relief apertures inside. Such a structure simultaneously allows a significant enhancement of the output power and a reduction in the number of optical modes in the optical spectrum, which migrates toward the quasi-single-mode (QSM). Comparison is made to multi-mode (MM) reference VCSELs produced without etching of the CS layer. The etched devices exhibit a larger signal-to-noise ratio for error-free 32 Gbit/s transmission over 100-m MM fibers (MMFs) at both wavelengths (850 and 940 nm). In addition, the dynamic/static performance of the etched samples is also superior to that of a QSM reference sample, produced by utilizing only Zn-diffusion apertures without etching of the CS layer. The demonstrated device structure opens the door to greatly improve the performance of SM and high-power VCSELs for high-speed data transmission.
ISSN:0018-9197
1558-1713
DOI:10.1109/JQE.2018.2869746