Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators with Variable Cross-Sections for Sensors and Energy Harvesters

Resonators based on micro and nanoelectromechanical systems (MEMS/NEMS) are used in many applications, including biological and gas sensors, magnetic field sensors, RF switches, accelerometers, piezoelectric micro and nanogenerators, and viscosity sensors. The design of these resonators requires ana...

Full description

Saved in:
Bibliographic Details
Published in:IEEE access 2021-01, Vol.9, p.1-1
Main Authors: Martinez-Cisneros, Eustaquio, Velosa-Moncada, Luis A., Elvira-Hernandez, Ernesto A., Nava-Galindo, Omar I., Aguilera-Cortes, Luz Antonio, Perez-Cuapio, Rene, De Leon, Arxel, Lopez-Huerta, Francisco, Salgado-Estrada, Rolando, Herrera-May, Agustin L.
Format: Article
Language:English
Subjects:
Accelerometers
Aerospace industry
Analytical models
Automobile industry
Avionics
Beam theory (structures)
Bending
bending resonant frequency
Clamping
Cross-sections
Energy harvesting
Euler-Bernoulli beam theory
Euler-Bernoulli beams
Finite element analysis
Finite element method
Frequency shift
Gas sensors
Macaulay method
Mathematical models
Mechanical properties
MEMS
Microelectromechanical systems
Modelling
multilayered resonator
Nanoelectromechanical systems
Nanogenerators
NEMS
Nondestructive testing
normal stress
Optimization
out-of-plane deflections
Piezoelectricity
Rayleigh method
Resonant frequencies
Resonant frequency
Resonators
Sensors
Shape
Stress
Switches
variable cross-section
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Resonators based on micro and nanoelectromechanical systems (MEMS/NEMS) are used in many applications, including biological and gas sensors, magnetic field sensors, RF switches, accelerometers, piezoelectric micro and nanogenerators, and viscosity sensors. The design of these resonators requires analytical models to predict their mechanical behavior and optimize the sensitivity and resolution. However, most of these models are only applied to resonators with rectangular and uniform cross-sections. In this paper, we present the analytical modeling to determine the first bending resonant frequency, out-of-plane deflections, and normal stresses of MEMS/NEMS-based multilayered resonators with variable cross-sections and multiple fixed supports. The proposed modeling is derived using the well-known Rayleigh and Macaulay methods, as well as the Euler-Bernoulli beam theory. This analytical modeling is applied to four multilayered resonators with different clamped supports and non-uniform cross-sections. The results of our analytical modeling agree well with respect to those of finite element method (FEM) models and experimental data reported in the literature. The proposed analytical modeling can be used to estimate the frequency shift of resonators due to variations of their geometric parameters, number of clamped-supports or mechanical properties of the materials. Furthermore, this modeling can be used to obtain optimal designs of resonators that ensure safe operations and enhanced performance for sensors and energy harvesters in telecommunications, automotive sector, aerospace industry, consumer electronics, non-destructive testing, and navigation.
ISSN:2169-3536
2169-3536
DOI:10.1109/ACCESS.2021.3084600