Accurate and robust noise-based trigger algorithm for soft breakdown detection in ultrathin gate dielectrics

Oxide breakdown is one of the most threatening failure mechanisms in integrated circuits. As the oxide thickness is decreased in the sub-5-nm range, the breakdown definition, itself is no longer clear and its detection becomes problematic. A new algorithm for accurate and robust automatic triggering...

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Bibliographic Details
Published in:IEEE transactions on device and materials reliability 2001-06, Vol.1 (2), p.120-127
Main Authors: Roussel, P.J., Degraeve, R., Van den Bosch, G.V., Kaczer, B., Groeseneken, G.
Format: Magazinearticle
Language:English
Subjects:
Acceptability
Algorithms
Applied sciences
Automatic testing
Breakdown
Breakdown voltage
Carbon capture and storage
Dielectric breakdown
Electric breakdown
Electric potential
Electronics
Exact sciences and technology
Gates
Geometry
Integrated circuit noise
Integrated circuits
Integrated circuits by function (including memories and processors)
Joining processes
Noise robustness
Oxides
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Stresses
Testing, measurement, noise and reliability
Thermal stresses
Voltage
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Summary:Oxide breakdown is one of the most threatening failure mechanisms in integrated circuits. As the oxide thickness is decreased in the sub-5-nm range, the breakdown definition, itself is no longer clear and its detection becomes problematic. A new algorithm for accurate and robust automatic triggering on soft breakdown (SBD) during constant voltage stress based on gate current noise increase is presented. Triggering on current spikes or pre-BD events is avoided. This test assures correct automatic SBD detection in a wide range of stress conditions and various geometries, with an execution speed that provides acceptable time resolution.
ISSN:1530-4388
1558-2574
DOI:10.1109/7298.956706