The structure and magnetic properties of sputtered, amorphous CoFeSiB thin films

Amorphous wires and ribbons of composition Co/sub 70.5/Fe/sub 4.5/Si/sub 15/B/sub 10/ have a very small magnetostriction and very low coercivities for wall motion. Their high permeabilities are of considerable technological interest. Thin films of these alloys might be useful for applications, but h...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on magnetics 1995-11, Vol.31 (6), p.3856-3858
Main Authors: Banerjee, R., Choe, G., Byung-Il Cho, Walser, R.M.
Format: Article
Language:English
Subjects:
Amorphous materials
Coercive force
Iron
Magnetic films
Magnetic properties
Magnetostriction
Permeability
Semiconductor thin films
Sputtering
Wires
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Amorphous wires and ribbons of composition Co/sub 70.5/Fe/sub 4.5/Si/sub 15/B/sub 10/ have a very small magnetostriction and very low coercivities for wall motion. Their high permeabilities are of considerable technological interest. Thin films of these alloys might be useful for applications, but had not been previously studied. This work studied the structural and magnetic properties of amorphous thin films sputtered from an alloy target with the composition Co/sub 70.5/Fe/sub 4.5/Si/sub 15/B/sub 10/. The results obtained show that the coercivity and in-plane anisotropy of the sputtered films are much larger than those of ribbons and wires. Attempts to reduce these parameters by varying the processing and annealing parameters, substrate material, composition, and film thickness were largely unsuccessful. While these results are not understood, the composite data suggests that the higher values may be due to micro-compositional inhomogeneities resulting from higher effective quench rates of sputtering.
ISSN:0018-9464
1941-0069
DOI:10.1109/20.489795