Atmospheric-pressure plasma by remote dielectric barrier discharges for surface cleaning of large area glass substrates

A remote dielectric barrier discharge (RDBD) plasma system has been used to clean glass-surfaces under atmospheric pressure. To achieve a sustainable process, it is critical to optimize the parameters that affect the surface condition. Hence, the physical and chemical properties of the glass surface...

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Bibliographic Details
Published in:Plasma Research Express 2019-02, Vol.1 (1), p.15015
Main Authors: Kim, Duk-jae, Park, Jeongwon
Format: Article
Language:English
Subjects:
atmospheric pressure
cleaning
DBD
glass
plasma
remote dielectric barrier discharge
surface
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Summary:A remote dielectric barrier discharge (RDBD) plasma system has been used to clean glass-surfaces under atmospheric pressure. To achieve a sustainable process, it is critical to optimize the parameters that affect the surface condition. Hence, the physical and chemical properties of the glass surface were investigated by changing the input voltage and the distance between the sample and electrodes. The optical emission spectroscopy (OES) characteristics were analyzed as a function of the gas concentration, and contact angles were measured before and after plasma treatments. The contact angle was reduced from 50 degrees (hydrophobic) to 5 degrees (hydrophilic) after the RDBD plasma treatment on the bare glass. The temperature of the samples was under 55 °C during the process without electrostatic charge. In this paper, we demonstrated the superior cleaning effectiveness of removing inorganic and organic contaminants on the glass surface using the RDBD without surface damage.
ISSN:2516-1067
2516-1067
DOI:10.1088/2516-1067/ab021c