N 2 –H 2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H 2 amount on electrons, positive ions and ammonia formation

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Bibliographic Details
Published in:Plasma sources science & technology 2020-08, Vol.29 (8), p.85019
Main Authors: Chatain, Audrey, Jiménez-Redondo, Miguel, Vettier, Ludovic, Guaitella, Olivier, Carrasco, Nathalie, Alves, Luis Lemos, Marques, Luis, Cernogora, Guy
Format: Article
Language:English
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ISSN:1361-6595
1361-6595
DOI:10.1088/1361-6595/ab9b1a