Nanonewton force measurement using a modified Michelson interferometer

In this paper, we introduce a new method to measure forces in the nanonewton range. The method is based on modification of a Michelson interferometer in which the rigid mirrors are replaced with two thin rod-like mirrors. One of the rod-like mirrors is fixed at both ends and the other has one free e...

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Bibliographic Details
Published in:Measurement science & technology 2017-03, Vol.28 (5), p.55205
Main Authors: Tahviliyan, Masoud, Charsooghi, Mohammad A, Akhlaghi, Ehsan A, Taghi Tavassoly, Mohammad
Format: Article
Language:English
Subjects:
interferometry
nanonewton force measurement
sensors and devices
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Summary:In this paper, we introduce a new method to measure forces in the nanonewton range. The method is based on modification of a Michelson interferometer in which the rigid mirrors are replaced with two thin rod-like mirrors. One of the rod-like mirrors is fixed at both ends and the other has one free end. As the mirror with free end deflects in response to an applied force the spatial interference pattern is changed. Analysis of the interference fringes provides a readout of the rod deflection and thereby the applied force. The device is calibrated by applying known forces to the mirror with a free end and measuring the resulting displacement. Two different methods, mechanical and electrostatic, are used for calibration. The precision of the measurements and the propagation of the calibration uncertainty are investigated. The results show that this optical method is a good candidate for detecting small forces in the nanonewton range.
ISSN:0957-0233
1361-6501
DOI:10.1088/1361-6501/aa62df