Two-dimensional grating interferometer with nanometer accuracy

A two-dimensional grating interferometer with the nanometer accuracy is proposed, which employs a transmissive two-dimensional diffraction grating and a corner cube prism in its optical configuration. The distinctive features of this optical path configuration are as follows: (i) Fourfold optical su...

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Bibliographic Details
Published in:AIP advances 2023-12, Vol.13 (12), p.125125-125125-10
Main Authors: Ban, Yaowen, Zhao, Guobo, Liu, Hui, Zhang, Zhenghui, Chen, Bangdao, Lu, Bingheng, Liu, Hongzhong
Format: Article
Language:English
Subjects:
Accuracy
Configurations
Gratings (spectra)
Interferometers
Light diffraction
Machining
Optical communication
Positioning devices (machinery)
Reproducibility
Retroreflection
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Summary:A two-dimensional grating interferometer with the nanometer accuracy is proposed, which employs a transmissive two-dimensional diffraction grating and a corner cube prism in its optical configuration. The distinctive features of this optical path configuration are as follows: (i) Fourfold optical subdivision is achieved based on the principle of secondary diffraction, enhancing optical subdivision capability. (ii) The utilization of a corner cube prism configuration enables parallel retroreflection of diffracted light, facilitating ease of optical alignment. Utilizing a two-dimensional transmissive grating with a period of 4 µm (resulting in an optical signal period of 1 µm after fourfold optical subdivision), the two-dimensional grating interferometer achieves measurement resolutions better than 8 nm along the x and y directions. Within a 100 µm range, the grating displacement errors are superior to ±38 and ±36 nm. The repeatability (standard deviation of error) during a reciprocating motion with a 4 µm stroke is superior to 14 nm. The proposed two-dimensional grating interferometer enables nanoscale resolution measurements, showcasing notable linear measurement capabilities and repeatability. It finds potential applications in ultra-accuracy positioning and machining equipment. The utilization of gratings with smaller periods holds the promise of realizing picometer-level measurement potential.
ISSN:2158-3226
2158-3226
DOI:10.1063/5.0179173