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Inversion mode n -channel GaAs field effect transistor with high- k /metal gate
Highly effective passivation of GaAs surface is achieved by a thin amorphous Si ( a - Si ) cap, deposited by plasma enhanced chemical vapor deposition method. Capacitance voltage measurements show that carrier accumulation or inversion layer is readily formed in response to an applied electrical fie...
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Published in: | Applied physics letters 2008-04, Vol.92 (15), p.153508-153508-2 |
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Main Authors: | , , , , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Highly effective passivation of GaAs surface is achieved by a thin amorphous Si
(
a
-
Si
)
cap, deposited by plasma enhanced chemical vapor deposition method. Capacitance voltage measurements show that carrier accumulation or inversion layer is readily formed in response to an applied electrical field when GaAs is passivated with
a
-
Si
. High performance inversion mode
n
-channel GaAs metal-oxide-semiconductor field-effect transistors (MOSFETs) were fabricated with an
a
-
Si
/high-
k
/metal gate stack. Drain current in saturation region of
220
mA
∕
mm
with a mobility of
885
cm
2
∕
V
s
were obtained at a gate overdrive voltage of
3.25
V
in MOSFETs with
5
μ
m
gate length. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2912027 |