Improved stoichiometry and misfit control in perovskite thin film formation at a critical fluence by pulsed laser deposition

Pulsed laser deposition (PLD) is a good method for growing high-quality functional oxide thin films because of the technical simplicity and the ease with which deposition can be switched from one material to another. However, the repeatability of film quality is often hard to achieve, especially whe...

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Bibliographic Details
Published in:Applied physics letters 2005-12, Vol.87 (24), p.241919-241919-3
Main Authors: Ohnishi, T., Lippmaa, M., Yamamoto, T., Meguro, S., Koinuma, H.
Format: Article
Language:English
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Summary:Pulsed laser deposition (PLD) is a good method for growing high-quality functional oxide thin films because of the technical simplicity and the ease with which deposition can be switched from one material to another. However, the repeatability of film quality is often hard to achieve, especially when using several different PLD systems. Here we report the steps that we have taken to grow nearly bulk-equivalent defect-free thin films, with Sr Ti O 3 as an example, by using PLD in a reproducible fashion. The ablation laser fluence was found to have a very strong effect on the lattice constant and defect structure of the films. Nonstoichiometric transfer of material from the ablation target was observed when either the laser fluence or the beam spot area was inadequate.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2146069