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Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO 2 coating
The mechanical and optical properties of Si and TiO 2 –Si nanopillars (NPl) were investigated. Mesoporous silicon NPl arrays were fabricated by metal-assisted chemical etching and nanosphere lithography, and then pillars were covered by TiO 2 using the atomic layer deposition technique. We performed...
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| Published in: | RSC advances 2016, Vol.6 (99), p.97070-97076 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Citations: | Items that this one cites Items that cite this one |
| Online Access: | Get full text |
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| Summary: | The mechanical and optical properties of Si and TiO
2
–Si nanopillars (NPl) were investigated. Mesoporous silicon NPl arrays were fabricated by metal-assisted chemical etching and nanosphere lithography, and then pillars were covered by TiO
2
using the atomic layer deposition technique. We performed scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDX), Raman spectroscopy, reflectance, photoluminescence (PL) spectroscopy and nanoindentation to characterize the as-prepared and annealed TiO
2
–Si NPl. The main structural and mechanical parameters of TiO
2
–Si NPl (grain size, strain, critical load, elastic recovery and Young's module) were calculated. Reflectance and PL spectroscopy were used to study the impact of morphology on optical properties of TiO
2
–Si NPl before and after annealing. It was established that the nanostructures of TiO
2
penetrated inside the porous matrix of Si pillar improve the mechanical properties of TiO
2
–Si NPl. The results of nanoindentation study have shown that Young's modulus of annealed TiO
2
–Si NPl is about three times higher than for the pure Si NPl. |
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| ISSN: | 2046-2069 2046-2069 |
| DOI: | 10.1039/C6RA21742G |