Effects of Tungsten Metal Coatings on Enhancing the Characteristics of Ultrananocrystalline Diamond Films

Nucleation of diamonds on Si substrates was pronouncedly improved by pre-coating a thin tungsten film on the substrates, which is attributed to the enhancement on the formation of the W−C phase in the tungsten silicon interface. The fact that the W coating can enhance the generation of the W−C phase...

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Published in:Journal of physical chemistry. C 2008-03, Vol.112 (10), p.3759-3765
Main Authors: Chen, Li-Ju, Liu, Chun-Chen, Tai, Nyan-Hwa, Lee, Chi-Young, Fang, Weileun, Lin, I-Nan
Format: Article
Language:English
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Summary:Nucleation of diamonds on Si substrates was pronouncedly improved by pre-coating a thin tungsten film on the substrates, which is attributed to the enhancement on the formation of the W−C phase in the tungsten silicon interface. The fact that the W coating can enhance the generation of the W−C phase for the W/Si substrate is ascribed to the fast accumulation of carbon species in the W layer, which, in turn, is consequence of the limit volume for carbon inward diffusion. On the contrary, the carbon species can diffuse into the bulk W materials continuously, resulting in a markedly slower rate of accumulation for carbon species and thus delaying the formation of diamond nuclei.
ISSN:1932-7447
1932-7455
DOI:10.1021/jp709777g