Nanostructuring of Iron Surfaces by Low-Energy Helium Ions

The behavior of iron surfaces under helium plasma exposure is investigated as a function of surface temperature, plasma exposure time, and He ion flux. Different surface morphologies are observed for a large process parameter range and discussed in terms of temperature-related surface mechanisms. Su...

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Bibliographic Details
Published in:ACS applied materials & interfaces 2014-03, Vol.6 (5), p.3462-3468
Main Authors: Tanyeli, İrem, Marot, Laurent, van de Sanden, Mauritius C. M, De Temmerman, Gregory
Format: Article
Language:English
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Summary:The behavior of iron surfaces under helium plasma exposure is investigated as a function of surface temperature, plasma exposure time, and He ion flux. Different surface morphologies are observed for a large process parameter range and discussed in terms of temperature-related surface mechanisms. Surface modification is observed under low-He ion flux (in the range of 1020 m–2 s–1) irradiation, whereas fiberlike iron nanostructures are formed by exposing the surface to a high flux (in the range of 1023 m–2 s–1) of low-energy He ions at surface temperatures of 450–700 °C. The effects of surface temperature and plasma exposure time on nanostructures are studied. The results show that surface processing by high-flux low-energy He ion bombardment provides a size-controlled nanostructuring on iron surfaces.
ISSN:1944-8244
1944-8252
DOI:10.1021/am405624v