Fabrication of Transferable Al 2 O 3 Nanosheet by Atomic Layer Deposition for Graphene FET

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Bibliographic Details
Published in:ACS applied materials & interfaces 2014-02, Vol.6 (4), p.2764-2769
Main Authors: Jung, Hanearl, Park, Jusang, Oh, Il-Kwon, Choi, Taejin, Lee, Sanggeun, Hong, Juree, Lee, Taeyoon, Kim, Soo-Hyun, Kim, Hyungjun
Format: Article
Language:English
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ISSN:1944-8244
1944-8252
DOI:10.1021/am4052987