Pulsed Laser Deposition for Improved Metal-oxide Gas Sensing Layers

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Bibliographic Details
Main Authors: Huotari, Joni, Kekkonen, Ville, Puustinen, Jarkko, Liimatainen, Jari, Lappalainen, Jyrki
Format: Conference Proceeding
Language:English
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ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2016.11.341