Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
•The open-loop and closed-loop control for a quasi-static micro scanner is shown.•The nonlinear mechatronic system model is parameterized by measurements.•Jerk-limited trajectories in physical limits allow avoiding residual oscillation.•Based on flatness an extended PIDk controller and a Luenberger...
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| Published in: | Mechatronics (Oxford) 2018-12, Vol.56, p.318-331 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | eng |
| Subjects: | |
| Online Access: | Get full text |
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| Summary: | •The open-loop and closed-loop control for a quasi-static micro scanner is shown.•The nonlinear mechatronic system model is parameterized by measurements.•Jerk-limited trajectories in physical limits allow avoiding residual oscillation.•Based on flatness an extended PIDk controller and a Luenberger observer are used.•The performance improvement is validated by experimental results.
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This paper describes the open-loop and closed-loop control for quasi-static microscanners exploiting the inherent flatness property. The developed nonlinear control method is verified on a gimbaled quasi-static/resonant scanning micro mirror with electrostatic staggered vertical comb (SVC) drive actuation. Based on a mechatronic micro mirror model, we present a flatness-based feed forward control method using jerk-limited trajectories to reduce undesired oscillations. For the closed-loop control we introduce a stabilizing linearizing feedback including an extended Luenberger observer for improvement of the command tracking in presence of model inaccuracies. The experimental results for both scenarios, open-loop and closed-loop control, are compared with simulations and further assessed in terms of performance and feasibility for industrial application. |
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| ISSN: | 0957-4158 1873-4006 |