Study on SnO2/Al/SiO2/Si ISFET with a metal light shield

Bibliographic Details

Published in:	Materials chemistry and physics 2000-02, Vol.63 (2), p.153-156
Main Authors:	WU, C.-L, CHOU, J.-C, CHUNG, W.-Y, SUN, T.-P, HSIUNG, S.-K
Format:	Article
Language:	eng
Subjects:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:	Get full text
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