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Feasibility of BCB as an interlevel dielectric in integrated circuits

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Bibliographic Details
Published in:	Journal of electronic materials 1994-08, Vol.23 (8), p.819-825
Main Authors:	BOTHRA, S, KELLAM, M, GARROU, P
Format:	Article
Language:	English
Subjects:	Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Integrated circuits Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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