On the development of the morphology of ultrananocrystalline diamond films

The development of the unique morphology of ultrananocrystalline diamond (UNCD) films has been investigated by varying three important parameters which are expected to have a pronounced influence on the morphology and structure of any thin film, namely the deposition time, the growth rate, and the n...

Full description

Saved in:
Bibliographic Details
Published in:Physica status solidi. A, Applications and materials science Applications and materials science, 2011-01, Vol.208 (1), p.70-80
Main Authors: Kulisch, Wilhelm, Popov, Cyril, Sasaki, Takao, Sirghi, Lucel, Rauscher, Hubert, Rossi, Francois, Reithmaier, Johann Peter
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
growth
Materials science
morphology
nanocrystalline diamond
Nanocrystalline materials
Nanoscale materials and structures: fabrication and characterization
Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals
nucleation
Physics
Structure of solids and liquids
crystallography
surface roughness
thin films
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The development of the unique morphology of ultrananocrystalline diamond (UNCD) films has been investigated by varying three important parameters which are expected to have a pronounced influence on the morphology and structure of any thin film, namely the deposition time, the growth rate, and the nucleation density. The films have been characterized, among others, by scanning electron microscopy (SEM), atomic force microscopy (AFM), Fourier transform infrared spectroscopy (FTIR), nuclear reaction analysis and variable angle ellipsometry. It turned out, however, that the morphology and the rms roughness are almost independent of these parameters. Growth starts from individual nucleation sites created by the substrate pre‐treatment. From these sites individual isolated semispherical nodules develop which finally coalesce to form a continuous film. Once coalescence has taken place, the films loose their “memory” of their nucleation history. Rather, morphology and roughness are solely determined by the rate of secondary nucleation, which is very high and distinguishes UNCD from poly‐ and nanocrystalline diamond films.
ISSN:1862-6300
1862-6319
DOI:10.1002/pssa.201026066