Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact exci...

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Bibliographic Details
Published in:Chinese physics B 2011, Vol.20 (1), p.486-492
Main Author: 虞一青 辛煜 宁兆元
Format: Article
Language:English
Subjects:
Langmuir探针
低气压
容性耦合
无线电频率
氩离子
电子碰撞激发
等离子体辐射
辐射模型
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Summary:This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states （4s[3/2]2, 4s＇[1/2]0）, is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines （located at 696.5 nm and 750.4 nm） are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.
ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/20/1/015207