Langmuir Probe and Optical Emission Spectroscopy Studies of Low-Pressure Gas Mixture of CO2 and N2

Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength range of 200 nm to 900 nm. The principal species observed were O2^＋ （A^2П→ X^2П）,...

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Bibliographic Details
Published in:Plasma science & technology 2010-06, Vol.12 (3), p.314-319
Main Author: E. F. MENDEZ-MARTINEZ P. G. REYES D. OSORIO-GONZALEZ F. CASTILLO H. MARTINEZ
Format: Article
Language:English
Subjects:
Bands
Carbon dioxide
Computer simulation
Density
Electron temperature
Gas mixtures
Langmuir waves
Monte Carlo methods
Optical emission spectroscopy
低压二氧化碳
发射光谱
朗缪尔探针
混合气体
电子温度
蒙特卡罗模拟
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Summary:Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength range of 200 nm to 900 nm. The principal species observed were O2^＋ （A^2П→ X^2П）, CO^＋ （A^2П→X^2∑）, N2^＋ （B^2∑u＋ → X^2∑g^＋）, CO2^＋ （A^2∏ → X^2∏）, N2（C^3∏u → B^3∏g）, O2（b^1∑g^＋→ X^3∑g^-）, and CO （a^r3∑→a^3∏）. The behavior of the band intensities as a function of the N2 percentage is consistent with recent Monte Carlo simulations. The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found in the range of 1.55 eV to 2.93 eV, and the electron concentration in the order of 10^10 cm^-3. The electron temperature and ion density at pure N2 and pure CO2 agree with previous measurements.
ISSN:1009-0630
DOI:10.1088/1009-0630/12/3/14