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Semiconductor doping
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Semiconductor doping
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Semiconductor doping
Semiconductors
5
Defects
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Heat treatment
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Rapid thermal processing
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Ion implantation
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Chemical vapor deposition
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Dielectrics
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Silicon
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14th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2006 : October 10-13, 2006, Kyoto Brighton Hotel, Kyoto, Japan / IEEE Electron Devices Socie...
Published 2006
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Impurity doping processes in silicon / edited by F.F.Y. Wang.
Published 1981
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Ion implantation and beam processing / edited by J.S. Williams, J.M. Poate.
Published 1984
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15th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / IEEE Electron Devices Soc...
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16th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2008 : September 30- October 3, 2008, the Platinum Hotel and Spa, Las Vegas, NV / IEEE Elect...
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Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A. / editors, Ursula Gibson, Alice E. White, Peter P. Pronko.
Published 1987
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Semiconductor technology : processing and novel fabrication techniques / edited by Mikhail E. Levinshtein, Michael S. Shur.
Published 1997
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Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A. / editors, Steven R.J. Brueck ... (et..
Published 1995
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Pilkington Library
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500 - Science
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600 - Technology
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IEEE Electron Devices Society
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Brueck, S. R. J.
1
Gibson, Ursula Jane
1
IEEE International Conference on Advanced Thermal Processing of Semiconductors Catania, Italy
1
IEEE International Conference on Advanced Thermal Processing of Semiconductors Kyoto, Japan
1
IEEE International Conference on Advanced Thermal Processing of Semiconductors Las Vegas, Nev
1
IEEE Xplore (Online service)
1
Levinshtein, M. E. (Mikhail Efimovich)
1
Materials Research Society
1
Poate, J. M. (John Milo), 1940-
1
Pronko, Peter P
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Shur, Michael
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Wang, Franklin F. Y., 1928-
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White, Alice E
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Williams, J. S. (James Stanislaus)
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