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  1. 1
    The MEMS handbook. edited by Mohamed Gad-el-Hak.
    Published 2005
    Edition: 2nd ed.
    “...Mechanical engineering series (Boca Raton, Fla.)...”
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  2. 2
    Electromechanical sensors and actuators / Ilene J. Busch-Vishniac.
    by Busch-Vishniac, Ilene J.
    Published 1999
    “...Mechanical engineering series...”
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