Interfacial surface roughness determination by coherence scanning interferometry using noise compensation
The capability of coherence scanning interferometry has been extended recently to include the determination of the interfacial surface roughness between a thin film and a substrate when the surface perturbations are less than ∼10 nm∼10 nm in magnitude. The technique relies on introducing a first-o...
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| Main Authors: | , , |
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| Format: | Default Article |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/25292 |
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