On tilt and curvature dependent errors and the calibration of coherence scanning interferometry
© 2017, OSA - The Optical Society. All rights reserved.Although coherence scanning interferometry (CSI) is capable of measuring surface topography with sub-nanometre precision, it is well known that the performance of measuring instruments depends strongly on the local tilt and curvature of the samp...
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| Main Authors: | , , , |
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| Format: | Default Article |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/25069 |
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