Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

In atmospheric-pressure plasmas the main electron heating mechanism is Ohmic heating, which has distinct spatial and temporal evolutions in the α and γ modes. In γ discharges, ionizing avalanches in the sheaths are initiated not only by secondary electrons but also by metastable pooling reactions. I...

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Main Authors: D.W. Liu, Felipe Iza, Michael G. Kong
Format: Default Article
Published: 2008
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Online Access:https://hdl.handle.net/2134/5212
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spelling rr-article-95647762008-01-01T00:00:00Z Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas D.W. Liu (7210967) Felipe Iza (7128233) Michael G. Kong (7128488) Mechanical engineering not elsewhere classified Electron avalanches Plasma ohmic heating Plasma radiofrequency heating Plasma sheaths Mechanical Engineering not elsewhere classified In atmospheric-pressure plasmas the main electron heating mechanism is Ohmic heating, which has distinct spatial and temporal evolutions in the α and γ modes. In γ discharges, ionizing avalanches in the sheaths are initiated not only by secondary electrons but also by metastable pooling reactions. In α discharges, heating takes place at the sheath edges and in contrast with low-pressure plasmas, close to 50% of the power absorbed by the electrons is absorbed at the edge of the retreating sheaths. This heating is due to a field enhancement caused by the large collisionality in atmospheric-pressure discharges. 2008-01-01T00:00:00Z Text Journal contribution 2134/5212 https://figshare.com/articles/journal_contribution/Electron_heating_in_radio-frequency_capacitively_coupled_atmospheric-pressure_plasmas/9564776 CC BY-NC-ND 4.0
institution Loughborough University
collection Figshare
topic Mechanical engineering not elsewhere classified
Electron avalanches
Plasma ohmic heating
Plasma radiofrequency heating
Plasma sheaths
Mechanical Engineering not elsewhere classified
spellingShingle Mechanical engineering not elsewhere classified
Electron avalanches
Plasma ohmic heating
Plasma radiofrequency heating
Plasma sheaths
Mechanical Engineering not elsewhere classified
D.W. Liu
Felipe Iza
Michael G. Kong
Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
description In atmospheric-pressure plasmas the main electron heating mechanism is Ohmic heating, which has distinct spatial and temporal evolutions in the α and γ modes. In γ discharges, ionizing avalanches in the sheaths are initiated not only by secondary electrons but also by metastable pooling reactions. In α discharges, heating takes place at the sheath edges and in contrast with low-pressure plasmas, close to 50% of the power absorbed by the electrons is absorbed at the edge of the retreating sheaths. This heating is due to a field enhancement caused by the large collisionality in atmospheric-pressure discharges.
format Default
Article
author D.W. Liu
Felipe Iza
Michael G. Kong
author_facet D.W. Liu
Felipe Iza
Michael G. Kong
author_sort D.W. Liu (7210967)
title Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
title_short Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
title_full Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
title_fullStr Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
title_full_unstemmed Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
title_sort electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
publishDate 2008
url https://hdl.handle.net/2134/5212
_version_ 1797288365086736384