Surface measurement errors using commercial scanning white light interferometers

This paper examines the performance of commercial scanning white light interferometers in a range of measurement tasks. A step height artefact is used to investigate the response of the instruments at a discontinuity, while gratings with sinusoidal and rectangular profiles are used to investigate th...

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Bibliographic Details
Main Authors: F. Gao, Richard K. Leach, Jon Petzing, Jeremy Coupland
Format: Default Article
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/2134/3633
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