Surface measurement errors using commercial scanning white light interferometers
This paper examines the performance of commercial scanning white light interferometers in a range of measurement tasks. A step height artefact is used to investigate the response of the instruments at a discontinuity, while gratings with sinusoidal and rectangular profiles are used to investigate th...
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Main Authors: | , , , |
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Format: | Default Article |
Published: |
2008
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Subjects: | |
Online Access: | https://hdl.handle.net/2134/3633 |
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