Surface measurement errors using commercial scanning white light interferometers

This paper examines the performance of commercial scanning white light interferometers in a range of measurement tasks. A step height artefact is used to investigate the response of the instruments at a discontinuity, while gratings with sinusoidal and rectangular profiles are used to investigate th...

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Main Authors:	F. Gao, Richard K. Leach, Jon Petzing, Jeremy Coupland
Format:	Default Article
Published:	2008
Subjects:	Mechanical engineering not elsewhere classified White light interferometry Measurement errors Surface roughness measurement Multiple scattering effect Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/3633
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id	rr-article-9564596
record_format	Figshare
spelling	rr-article-95645962008-01-01T00:00:00Z Surface measurement errors using commercial scanning white light interferometers F. Gao (3982529) Richard K. Leach (3722449) Jon Petzing (1259430) Jeremy Coupland (1248465) Mechanical engineering not elsewhere classified White light interferometry Measurement errors Surface roughness measurement Multiple scattering effect Mechanical Engineering not elsewhere classified This paper examines the performance of commercial scanning white light interferometers in a range of measurement tasks. A step height artefact is used to investigate the response of the instruments at a discontinuity, while gratings with sinusoidal and rectangular profiles are used to investigate the effects of surface gradient and spatial frequency. Results are compared with measurements made with tapping mode atomic force microscopy and discrepancies are discussed with reference to error mechanisms put forward in the published literature. As expected it is found that most instruments report errors when used in regions close to a discontinuity or those with a surface gradient that is large compared to the acceptance angle of the objective lens. Amongst other findings, however, we report systematic errors that are observed when the surface gradient is considerably smaller. Although these errors are typically less than the mean wavelength they are significant compared to the instrument resolution and indicate that current scanning white light interferometers should be used with some caution if sub-wavelength accuracy is required. 2008-01-01T00:00:00Z Text Journal contribution 2134/3633 https://figshare.com/articles/journal_contribution/Surface_measurement_errors_using_commercial_scanning_white_light_interferometers/9564596 CC BY-NC-ND 4.0
institution	Loughborough University
collection	Figshare
topic	Mechanical engineering not elsewhere classified White light interferometry Measurement errors Surface roughness measurement Multiple scattering effect Mechanical Engineering not elsewhere classified
spellingShingle	Mechanical engineering not elsewhere classified White light interferometry Measurement errors Surface roughness measurement Multiple scattering effect Mechanical Engineering not elsewhere classified F. Gao Richard K. Leach Jon Petzing Jeremy Coupland Surface measurement errors using commercial scanning white light interferometers
description	This paper examines the performance of commercial scanning white light interferometers in a range of measurement tasks. A step height artefact is used to investigate the response of the instruments at a discontinuity, while gratings with sinusoidal and rectangular profiles are used to investigate the effects of surface gradient and spatial frequency. Results are compared with measurements made with tapping mode atomic force microscopy and discrepancies are discussed with reference to error mechanisms put forward in the published literature. As expected it is found that most instruments report errors when used in regions close to a discontinuity or those with a surface gradient that is large compared to the acceptance angle of the objective lens. Amongst other findings, however, we report systematic errors that are observed when the surface gradient is considerably smaller. Although these errors are typically less than the mean wavelength they are significant compared to the instrument resolution and indicate that current scanning white light interferometers should be used with some caution if sub-wavelength accuracy is required.
format	Default Article
author	F. Gao Richard K. Leach Jon Petzing Jeremy Coupland
author_facet	F. Gao Richard K. Leach Jon Petzing Jeremy Coupland
author_sort	F. Gao (3982529)
title	Surface measurement errors using commercial scanning white light interferometers
title_short	Surface measurement errors using commercial scanning white light interferometers
title_full	Surface measurement errors using commercial scanning white light interferometers
title_fullStr	Surface measurement errors using commercial scanning white light interferometers
title_full_unstemmed	Surface measurement errors using commercial scanning white light interferometers
title_sort	surface measurement errors using commercial scanning white light interferometers
publishDate	2008
url	https://hdl.handle.net/2134/3633
_version_	1797378712026480640

Surface measurement errors using commercial scanning white light interferometers

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