Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography

A method has been developed for the manufacture of polymeric multimode waveguides using an electrostatic field-induced self assembly and pattern formation process. A spin-coated liquid optical polymer placed between two conductive plates experiences an electrostatic force from an applied electric fi...

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Main Authors:	Tze Yang Hin, Changqing Liu, Paul Conway, Weixing Yu, Scott Cargill, Marc P.Y. Desmulliez
Format:	Default Article
Published:	2010
Subjects:	Mechanical engineering not elsewhere classified Electrostatic-induced lithography Flexible substrate Optical core patterning Polymer waveguide Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/7137
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id	rr-article-9560282
record_format	Figshare
spelling	rr-article-95602822010-01-01T00:00:00Z Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography Tze Yang Hin (7201388) Changqing Liu (1249713) Paul Conway (1249635) Weixing Yu (1721503) Scott Cargill (7210997) Marc P.Y. Desmulliez (7211000) Mechanical engineering not elsewhere classified Electrostatic-induced lithography Flexible substrate Optical core patterning Polymer waveguide Mechanical Engineering not elsewhere classified A method has been developed for the manufacture of polymeric multimode waveguides using an electrostatic field-induced self assembly and pattern formation process. A spin-coated liquid optical polymer placed between two conductive plates experiences an electrostatic force from an applied electric field gradient across the plates. Surface electrohydrodynamics instability patterning is employed to fabricate optical core microstructures using a patterned master plate. The result shows a good replication of the pattern from the master plate to the optical polymer. The process protocols were defined to achieve waveguides with low sidewall roughness together with an optical coupling interface. We have demonstrated multimode waveguide arrays with a 50 μm × 50 μm cross section and 250-μm pitch on a 10 mm × 10 mm flexible substrate. The refractive index and absorption measurement of the electrostatic-induced optical film show insignificant changes when compared with the unexposed film. Using the cutback approach, the propagation loss of the waveguide is measured at -1.97 dB/cm. The whole fabrication process is found to be fast, cost-effective, and no photosensitive material is needed as in the conventional photolithography approach. 2010-01-01T00:00:00Z Text Journal contribution 2134/7137 https://figshare.com/articles/journal_contribution/Fabrication_of_a_polymeric_optical_waveguide-on-flex_using_electrostatic-induced_lithography/9560282 CC BY-NC-ND 4.0
institution	Loughborough University
collection	Figshare
topic	Mechanical engineering not elsewhere classified Electrostatic-induced lithography Flexible substrate Optical core patterning Polymer waveguide Mechanical Engineering not elsewhere classified
spellingShingle	Mechanical engineering not elsewhere classified Electrostatic-induced lithography Flexible substrate Optical core patterning Polymer waveguide Mechanical Engineering not elsewhere classified Tze Yang Hin Changqing Liu Paul Conway Weixing Yu Scott Cargill Marc P.Y. Desmulliez Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography
description	A method has been developed for the manufacture of polymeric multimode waveguides using an electrostatic field-induced self assembly and pattern formation process. A spin-coated liquid optical polymer placed between two conductive plates experiences an electrostatic force from an applied electric field gradient across the plates. Surface electrohydrodynamics instability patterning is employed to fabricate optical core microstructures using a patterned master plate. The result shows a good replication of the pattern from the master plate to the optical polymer. The process protocols were defined to achieve waveguides with low sidewall roughness together with an optical coupling interface. We have demonstrated multimode waveguide arrays with a 50 μm × 50 μm cross section and 250-μm pitch on a 10 mm × 10 mm flexible substrate. The refractive index and absorption measurement of the electrostatic-induced optical film show insignificant changes when compared with the unexposed film. Using the cutback approach, the propagation loss of the waveguide is measured at -1.97 dB/cm. The whole fabrication process is found to be fast, cost-effective, and no photosensitive material is needed as in the conventional photolithography approach.
format	Default Article
author	Tze Yang Hin Changqing Liu Paul Conway Weixing Yu Scott Cargill Marc P.Y. Desmulliez
author_facet	Tze Yang Hin Changqing Liu Paul Conway Weixing Yu Scott Cargill Marc P.Y. Desmulliez
author_sort	Tze Yang Hin (7201388)
title	Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography
title_short	Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography
title_full	Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography
title_fullStr	Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography
title_full_unstemmed	Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography
title_sort	fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography
publishDate	2010
url	https://hdl.handle.net/2134/7137
_version_	1796471882083467264

Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography

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