Low-power microwave plasma source based on a microstrip split-ring resonator
Microplasma sources can be integrated into portable devices for applications such as bio-microelectromechanical system sterilization, small-scale materials processing, and microchemical analysis systems. Portable operation, however, limits the amount of power and vacuum levels that can be employed i...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Default Article |
| Published: |
2003
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/3211 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|