Comparison of DC and RF sputtered aluminium-doped zinc oxide for photovoltaic applications
AZO was sputter deposited using both RF and DC power supplies from a pre-formed ceramic AZO target with a 2 wt % aluminium oxide dopant concentration. The target was formed by hot pressing pre-doped nanoparticles produced using an emulsion detonation synthesis technique. AZO films were found to disp...
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| Main Authors: | , , , , , |
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| Format: | Default Conference proceeding |
| Published: |
2015
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/20174 |
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