Optical microscopy for engineering measurement - numbers with confidence

The demand for surface metrology has been increasing over several decades, with industrial requirements for quantification of structured and randomly rough surface features. This has been matched by the development of a range of dedicated non-contact microscope based techniques for three-dimensional...

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Bibliographic Details
Main Author: Jon Petzing
Format: Default Conference proceeding
Published: 2014
Subjects:
Online Access:https://hdl.handle.net/2134/15552
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