Protrusion of Cu-TSV under different strain states
A phase-field-crystal (PFC) model is used to investigate the protrusion of blind TSVs under different strain states. The direction of loading applied to the TSVs has an effect on the protrusion, which is closely related to the copper grains and their orientations at the TSV edges. A nonlinear relati...
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| Main Authors: | , , , |
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| Format: | Default Conference proceeding |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/37744 |
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