Experimental and numerical study of radio fequency atmospheric pressure glow discharges

Radio frequency (rf) atmospheric pressure glow discharges (APGDs) have received growing attention for their exciting scope of new science and their immense potential for widespread applications. While geometrically similar to conventional low-pressure discharges used in the semiconductor industry fo...

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Bibliographic Details
Main Author: Dawei Liu
Format: Default Thesis
Published: 2009
Online Access:https://hdl.handle.net/2134/13987
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