Scattering and three-dimensional imaging in surface topography measuring interference microscopy

Surface topography measuring interference microscopy is a three-dimensional (3D) imaging technique that provides quantitative analysis of industrial and biomedical specimens. Many different instrument modalities and configurations exist, but they all share the same theoretical foundation. In this pa...

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Bibliographic Details
Main Authors: Rong Su, Jeremy Coupland, Colin Sheppard, Richard Leach
Format: Default Article
Published: 2021
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Online Access:https://hdl.handle.net/2134/14332934.v1
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