900-channel single-shot surface roughness measurement using hyperspectral interferometry
A recently developed hyperspectral interferometer has been applied, for the first time, to the single-shot measurement of surface roughness. Traditional optical surface profiling techniques, such as coherence scanning interferometry (CSI) or focus variation microscopy, require long scan times and me...
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| Main Authors: | , , |
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| Format: | Default Article |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/11317616.v1 |
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