Laser precision microfabrication / Koji Sugioka, Michel Meunier, Alberto Piqué, editors.
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| Other Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin :
Springer,
c2010.
|
| Series: | Springer series in materials science ;
v. 135. |
| Subjects: | |
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