Laser precision microfabrication / Koji Sugioka, Michel Meunier, Alberto Piqué, editors.
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| Other Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin :
Springer,
c2010.
|
| Series: | Springer series in materials science ;
v. 135. |
| Subjects: | |
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| 245 | 0 | 0 | |a Laser precision microfabrication / |c Koji Sugioka, Michel Meunier, Alberto Piqué, editors. |
| 260 | |a Berlin : |b Springer, |c c2010. | ||
| 300 | |a xvi, 344 p. : |b ill. (some col.) ; |c 24 cm. | ||
| 490 | 1 | |a Springer series in materials science ; |v 135 | |
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Lasers |x Industrial applications. | |
| 650 | 0 | |a Microfabrication. | |
| 650 | 0 | |a Manufacturing processes. | |
| 700 | 1 | |a Sugioka, Koji | |
| 700 | 1 | |a Meunier, Michel, |d 1956- | |
| 700 | 1 | |a Piqué, Alberto | |
| 830 | 0 | |a Springer series in materials science ; |v v. 135. | |
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