Fundamentals of microfabrication and nanotechnology. Marc J. Madou. Vol. 2, Manufacturing techniques for microfabrication and nanotechnology /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla. ; London :
CRC,
c2012.
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| Edition: | 3rd ed. |
| Subjects: | |
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| LEADER | 01494nam a2200361 4500 | ||
|---|---|---|---|
| 001 | 001225022 | ||
| 005 | 20190207123112.0 | ||
| 008 | 081001s2012 fluac f 001 0 eng|d | ||
| 020 | |a 1420055194 | ||
| 020 | |a 9781420055191 | ||
| 040 | |a StDuBDS |c StDuBDS | ||
| 082 | 0 | 4 | |a 620.5 |2 23 |
| 089 | |a 620.5 | ||
| 100 | 1 | |a Madou, Marc J. | |
| 245 | 1 | 0 | |a Fundamentals of microfabrication and nanotechnology. |n Vol. 2, |p Manufacturing techniques for microfabrication and nanotechnology / |c Marc J. Madou. |
| 250 | |a 3rd ed. | ||
| 260 | |a Boca Raton, Fla. ; |a London : |b CRC, |c c2012. | ||
| 300 | |a 3 v. (various pagings) : |b ill. (chiefly col.), ports. ; |c 29 cm. | ||
| 500 | |a Previous ed.: published as Fundamentals of microfabrication. 2002. | ||
| 500 | |a Text on lining papers. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Microelectronics. | |
| 650 | 0 | |a Integrated circuits |x Design and construction. | |
| 650 | 0 | |a Microelectromechanical systems |x Design and construction. | |
| 650 | 0 | |a Machining. | |
| 650 | 0 | |a Lasers |x Industrial applications. | |
| 650 | 0 | |a Microelectronic packaging. | |
| 650 | 0 | |a Microfabrication. | |
| 650 | 0 | |a Nanostructured materials |x Design and construction. | |
| 700 | 1 | |a Madou, Marc J. |t Fundamentals of microfabrication. | |
| 952 | |0 0 |1 0 |4 0 |6 620_500000000000000_MAD |7 0 |9 804743 |a PILKINGTON |b PILKINGTON |c MAIN |d 2012-10-19 |g 125.12 |l 7 |m 1 |o 620.5/MAD |p 0404029442 |r 2019-06-28 |s 2019-02-07 |w 2018-02-01 |y LONG | ||
| 999 | |c 497285 |d 497285 | ||
| 942 | 0 | 0 | |0 1 |